Chapter 11

MAV Design Aspects Using MEMS

Suryanarayana Palleboina and Kamalakar Pallela

Abstract Use of MEMS (Micro-Electro-Mechanical Systems) for biomimicking

aerial vehicles (MAV’s) is an opportunity and also a new challenge for semiconductor

technology. The capabilities and limitations of MEMS are important to consider them

for design of biomimicking MAVs. A systematic approach is necessary to identify

various components such as mechanical parts of body, wings, sensors, communi-

cation system and compatible electronic components. The unit process has to be

optimized for mechanical parts by designing a PEV (Process Evaluation Vehicle).

Testing the specifications of the components is a must. Hybrid material can be used

for biomimicking wings.

Keywords MEMS · Integrated circuit (IC) · Mechanical gear system · Actuators ·

PEV

Introduction to MEMS

Micro-Electro-Mechanical Systems, or MEMS, are a technology that in its general

form can be defined as miniaturized mechanical and electro-mechanical elements

(i.e., devices and structures) that are made using the techniques of micro-fabrication.

The critical physical dimensions of MEMS devices can vary from one micron at the

lower end to several millimetres. Likewise, the types of MEMS devices can vary

from relatively simple structures having no moving elements to extremely complex

electromechanical systems with multiple moving elements under the control of inte-

grated microelectronics. The one main criterion of MEMS is that there are at least

some elements having some sort of mechanical functionality.

S. Palleboina (B)

CEERI-CISR, Pilani, India

SNIST, Hyderabad, India

GAETEC, DRDO, Kurmalguda, India

K. Pallela

ECE Department, SRF, SNIST, Hyderabad, India

© The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2021

N. Chari et al. (eds.), Biophysics of Insect Flight, Springer Series in Biophysics 22,

https://doi.org/10.1007/978-981-16-5184-7_11

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